Etching相关论文
39. Ultrastructural Changes of Neurons Located at Anterior Horn of Lumbar Spinal cord in Ethylene Ox
Mice inhaled ethylene oxide at concentration of 360 mg/m3 for two hours a day, six days a week for 14 weeks. At the end ......
Cu-Ni core-shell nanowires, with an inner Cu core diameter of about 60 nm and varying Ni shell thicknesses (10, 30, 50, ......
Multifunctional surfaces with outstanding mechanical stability on glass substrates by simple H2SiF6-
Mechanically robust antireflective glass surfaces play an important role in the performance of many optical and optoelec......
In order to improve the oxidation resistance of C/C composites, plasma Ni-Cr alloying was prepared on the hydrogen etche......
Characteristics of weakly magnetized inductively coupled plasma (MICP),a plasma source utilizing cavity mode of low freq......
A Comparison of dry etch characteristics using NF3 and SF6 in the contact hole etch process in the T
Currently SF6 chemistry is mainly used for dry etching a SiNx thin film which is used for the dielectric layer in the TF......
A two-dimensional profile evolution of a Si trench is simulated in a radio frequency capacitively coupled plasma (rf-CCP......
With the use of temperature programmed desorption (TPD),properties of hydrogen trapping in silicon during argon and hydr......
For the various electronic devices such as microelectromechanical system (MEMS) devices,thin film transistor-liquid crys......
Surface refinement of TiO2-based coatings by adjusting chemical composition and nanotopography for o
Surface topography and chemistry have significant influences on the biological performance of biomedical implants [1,2].......
The phenomenon of ordered pattern formation is universal in nature.Among countless pattern systems, a snowflake is possi......
Optimizing Hydrogen Plasma Etching Process of Preferred (110) Texture Diamond Film for MESFET Applic
...
Graphene which is 2-D carbon nanomaterial has been received significant attention by its outstanding properties that off......
Combination of reaction ion etching and dynamic chemical etching for improving laser damage resistan
An effective combined process of reaction ion etching (RIE) and dynamic chemical etching (DCE) is applied for significan......
A General Strategy to Prepare Metal Oxide Micro-/Nanostructured Arrays for High-Performance Lithium-
Assembling micro-/nanostructured arrays on conducting substrates allows the integration of multiple functionalities into......
A General Strategy to Prepare Metal Oxide Micro-/Nanostructured Arrays for High-Performance Electrod
Assembling micro-/nanostructured arrays on conducting substrates allows the integration of multiple functionalities into......
Controllable synthesis of transitional metal oxide arrays based on self-sustained cycle of hydrolysi
Assembling micro/nanostructured arrays on conducting substrates allows to synergize and integrate multi-fu nctionalities......
Modern materials processingoften involves complex chemistries and variety of species incoming from plasma to the wafer.I......
SiO2-Iike film deposition on copper surface by diffuse discharge enhanced CVD has already achieved in our previous work.......
This paper reports fabrication and characterization of ZnO nanotubes on Au cylindrical spirals.Highly oriented single-cr......
在二元光学衍射微透镜的制作工艺中, 光刻胶的行为和特性对衬底的最终图形有着极为重 要的作用。光刻和刻蚀两道工序都要求实际图......
报道了采用Cl2/N2电感耦合等离子(ICP)组合体刻蚀工艺在InAs/GaSb II类超晶格红外焦平面台面加工过程中的研究结果, 实验采用分子......
针对传统电路板集成方式的局限性,提出基于飞秒激光的覆铜板线路成形技术。采用飞秒激光对覆铜板进行单因素实验和正交实验,结果表......
利用深反应离子刻蚀技术或湿法腐蚀在硅上制作光栅结构,将与光栅浸润的液体作为载体携带铋纳米颗粒进入光栅结构内,形成致密排列,......
Semiconductor nuclear radiation detectors made from tertiary and quaternary compounds of cadmium telluride (CdTe) can op......
New Procedure to Obtain Specific and High Absorbent Silicon Nanotextures: Inverted Pyramids, Cubic N
The present work relates to a process for silicon surface texturing for preparing large-area, silicon nanotextures on si......
Controllable synthesis of transitional metal oxide arrays based on self-sustained cycle of hydrolysi
Assembling micro/nanostructured arrays on conducting substrates allows to synergize and integrate multi-fu nctionali......
Computer Modeling of Inductively Coupled Plasmas Plasma Chemistry and Feature Profile Simulations fo
In this talk,we will explain how to model etching and deposition processes for electronic device fabrication,as applied ......
Plasma etch processes used for integrated circuits fabrication become more and more challenging when thedevices dimensio......
Electro-passivated bright and metallic finishes have been produced on cast and wrought magnesium alloys: AZ91, AM50 and ......
Separation technology is an indispensable step in the preparation of freestanding GaN substrate. In this paper, a largea......
<正> Ⅰ. INTRODUCTION The natural stress of the rocks which were formed in very complicated geological environments sign......
This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier’s angular velocity,the si......
A solid ternary mixture consisting of NaF,silicon and one metal oxide such as La2O3,CeO2,Pr6O11,Nd2O3,and Y2O3 was prepa......
We report the controlled growth of Au25(SR)18 and Au38(SR)24 (where R=CH2CH2Ph) nanoclusters of molecular purity via siz......
We report on temperature-programmed growth of graphene islands on Ru(0001) at annealing temperatures of 700°C,800°C,an......
Controllable growth of anatase TiO2 crystals with exposed high reactive crystal facets has aroused great attention in th......
采用化学刻蚀两步法制备硅纳米线。在制作过程的不同阶段,通过金相显微镜,扫描电子显微镜及透射电子显微镜分别对其表面形态进行观......
The activation energy is the minimum amount of energy required to initiate a reaction.It is one of the important indexes......
Anodic Oxidation on Structural Evolution and Tensile Properties of Polyacrylonitrile Based Carbon Fi
Polyacrylonitrile (PAN) based carbon fibers with different surface morphology were electrochemically treated in 3 wt% NH......
Using argon as the work gas,the effects and mechanisms of poly(tetrafluoroethylene) (PTFE) film surface modification wer......
PLASMA MODIFICATION OF POLYPROPYLENE SURFACES AND GRAFTING COPOLYMERIZATION OF STYRENE ONTO POLYPROP
The surface of polypropylene(iPP) is modified with glow discharge plasma of Ar,so that the modified surfaces of iPP film......
Mesoporous iron oxide-silica composite with a high silica content was synthesized by hydrothermal method,and another com......
We report the assisted role of water vapor in crystallographic cutting of graphene via iron catalysts in reduced atmosph......
A reevaluation of the correlation between the synthesis parameters and structure and properties of n
Nitrogen-doped carbon nanotubes(NCNTs) were synthesized by chemical vapor deposition using cobaltbased oxides as catalys......
Effect of Fabrication Process Parameters on Microstructure Evolution and Spectral Characteristics of
Silicon carbide(SiC) quantum dots(QDs) in aqueous suspension were produced via corrosion in a mixture of chemical etchan......
(90-x)Te O2–x Zn O–10Bi2O3(x = 15, 17.5, 20 and 22.5, in mol%) and 70 Te O2–20Zn O–(10-y)Bi2O3-y Na2O(y = 1, 3, 5, 7......
A comparative electrochemical investigation of silicon nanowires formation via metal-catalyzed elect
In this study,the electrochemical behavior of monocrystalline bare Si and Ag-coated Si in hydrofluoric acid(HF)solutions......
We present a novel electrochemical technique for the fabrication of nano-photonic crystal structures. Based on a special......
Reactive ion etching of poly(vinylidene fluoride-trifluoroethylene) copolymer for flexible piezoelec
A microfabrication process for poly(vinylidene fluoride-trifluoroethylene)(P(VDF-TrFE)) based flexible piezoelectric dev......
